Effect of Additives on Shape Evolution during Electrodeposition II. Parameter Estimation from Roughness Evolution Experiments
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چکیده
II. Parameter Estimation from Roughness Evolution Experiments Effendi Rusli, Feng Xue, Timothy O. Drews, Philippe M. Vereecken,* Panos Andricacos, Hariklia Deligianni,* Richard D. Braatz,* and Richard C. Alkire** Department of Chemical and Biomolecular Engineering, University of Illinois at Urbana-Champaign, Urbana, Illinois 61801, USA IBM Research Division, Thomas J. Watson Research Center, Yorktown Heights, New York 10598, USA
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Effect of Additives on Shape Evolution during Electrodeposition I. Multiscale Simulation with Dynamically Coupled Kinetic Monte Carlo and Moving-Boundry Finite-Volume Codes
A multiscale simulation model was developed to simulate shape evolution during copper electrodeposition in the presence of additives. The model dynamically coupled a kinetic Monte Carlo KMC model for surface chemistry and roughness evolution with a finite volume FV model for transport and chemical reactions in the electrolyte and a level-set code for tracking macroscopic movement of the metal/e...
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